Plenary Talks

Design and Development of the Telescope Optics for the Thirty MeterTelescope (TMT)

Dr. Myung K.Cho National Optical Astronomy Observatory (USA)

ABSTRACT The Thirty Meter Telescope Project is a collaboration of the California Institute of Technology, the University of California, and the Association of Canadian Universities for Research in Astronomy. This telescope will be used for research in astronomy at visible and infrared wavelengths and its optical design is a Ritchey-Chrétien. The telescope is a 30 meter diameter f/15 system with a segmented primary mirror (M1); a 3.2 meter diameter, convex secondary mirror (M2); and an elliptical (3.5 meter in major axis and 2.5 meter in minor axis) flat tertiary mirror (M3). These will deliver an f/15 beam to adaptive optic systems and science instruments located on two Nasmyth platforms. This talk will describe an overview of the telescope optical systems (M1, M2, and M3) of TMT. Current design concepts, status of developments, and the optical performances of the telescope optics will be addressed.

BRIEF BIOGRAPHY Dr. Myung Cho servers as a principal engineer at the National Optical Astronomy Observatory (NOAO). He has been involved in the design and development of the optical telescopes and optical instruments including the Thirty Meter Telescope Project, the Advanced Technology Solar Telescope, the Large Synoptic Survey Telescope, the GEMINI 8m Telescopes, the WIYN 3.5m telescope, Gemini Near Infrared Spectrograph, and a variety of other telescopes and optical systems. Prior to joining NOAO, he was on the faculty at the College of Optical Sciences at the University of Arizona. Dr. Cho also serves as an adjunct professor at the Engineering Mechanics and the College of Optical Sciences. He earned his Ph.D. from the University of Arizona in 1989.

Gran Telescopio Canarias optics: A step towards the Extremely Large Telescope

Dr. Eric RUCH SAGEM Défense Sécurité REOSC Department France

ABSTRACT The REOSC High Performance Optics Department of SAGEM Défense Sécurité has been selected by GRANTECAN SA to manufacture the Gran Telescopio Canarias Zerodur primary mirror segments and the lightweighted Beryllium secondary mirror. The first set of six hexagonal, 1,8 m point to point, primary mirror segments has been delivered in March 2004 and the last batch of segments in December 2005. The secondary mirror has been delivered in March 2006. The paper will present the project and the optical requirements of the telescope primary and secondary mirrors. The technology developments that were made in the field of optical manufacturing as well as mechanical and optical metrology will be presented. Final optical performance of the 42 segments of the primary mirror and the secondary mirror will be reported. Several recent studies have been undertaken to analyze the requirements of the next generation of Extremely Large Telescope optics, in which several hundreds of segments will have to be produced in a limited time frame. Based on the experience gained on the production of the segments of the Gran Telescopio Canarias, we will present the challenges that will face the optical manufacturing community to be able to produce these segments at a rate and a price compatible with the budgets available for the ELT projects.

BRIEF BIOGRAPHY Eric Ruch is graduate in optical engineering from the Institute of Optics in Paris . He has joined REOSC in 1985, has work in lens design and has been project manager for several space and astronomy projects. Since 2006, he is responsible for the business development for the space and the astronomy activities of the REOSC department in SAGEM.

Sub-aperture Stitching Interferometry(SSI®) and Magneto-rheological Finishing (MRF®) of precision optics from millimeter to multi-meter size

Dr.Mike DeMarco QED,USA

ABSTRACT Today's optical designs often call for surfaces with increasingly larger clear apertures, higher numerical apertures, and tighter figure error tolerances. Optics manufacturers are challenged with smaller batch sizes, shorter lead times, and increasing competition from overseas producers: all of this during a period of dwindling optician resources that the industry has relied on for many years. Modern optics shops are transitioning from traditional manufacturing approaches to the adoption of CNC grinding and polishing tools, in particular, deterministic processes such as MRF. However, the optics finishing process is only as good as the metrology that feeds it. Metrology tools used to measure optical surfaces must keep pace with advances in manufacturing. Commercially available interferometers for optical surface testing are severely limited in the size and numerical aperture of the surfaces they can measure. Furthermore, the accuracy of the measurements is limited by the quality of reference artifacts, or the reliability of complicated absolute calibration methods.

BRIEF BIOGRAPHY Mike DeMarco, Sales Manager for QED Technologies, has spent his entire career in the fields of precision optics manufacturing and optical system assembly and testing. He has been on QED’s Marketing and Sales team since 2001. Prior to joining QED, he managed the Optical Assembly and Test Department for Perkin Elmer and SVG Lithography Systems in Wilton, CT. His academic background includes an MBA degree in Marketing and Operations from the University of Connecticut, and a BS degree in Optical Engineering from the University of Rochester. He is the author of many articles and papers in his chosen fields of interest.

A review of the evolving technologies relevant to the production of ultra-precision free-form surfaces

Dr. Richard Freeman Zeeko Ltd Unitd Kindom

ABSTRACT Over the last ten years a number of technologies and additional techniques have emerged to enable the efficient and deterministic production of free-form ultra-precision surfaces. Included in this area of development are ultra-precision grinders, generators, polishers and single point diamond turning machines. These machines must then be supported by free-form metrology solutions as well as new ways to fabricate the near net shape substrates essential for the efficient production of such surfaces. Included here are the precision moulding of glass, techniques for forming ceramics, the use of slumping, electroforming, rapid prototyping, sintering and other precision forming techniques. From these building blocks of technology have appeared production solutions that a decade ago would not have seemed feasible and this paper discusses these solutions and the process chains that they have created. Almost all such processes include the requirement for a near net shape substrate, a precision forming technology, a measurement solution and a finishing technology. The paper examines the solutions available, as well as some of the latest ones to emerge commenting on where they have been adopted thus far.

BRIEF BIOGRAPHY Richard Freeman is Managing Director of Zeeko Ltd, a fast growing hi-technology manufacturing company based in the UK. Zeeko Ltd designs, develops and builds machines for the corrective polishing of free-form surfaces as used in high precision optics, precision moulds, orthopaedic implants and components for the tool and die industry. In addition Zeeko has recently introduced a number of metrology products for the measurement of free-form ultra-precision surfaces. He is a mechanical engineer by qualification. Formerly Richard was Managing Director of Rank Taylor Hobson (Worldwide) – responsible for both the Measurement Division, the diamond turning business (at that time named Rank Pneumo – and now absorbed by Precitech), as well as the Cooke precision lens business. He was for some years a member of the Measurement Advisory Committee to the UK Government. Zeeko Ltd was formed in late 2000 and since then, building it to a position of influence in this tightly defined area has been his single minded focus.

Advances in Optical Manufacturing Technologies at Fraunhofer IPT

Prof. Fritz Klocke GERMANY

Dr. Richard Zunke GERMANY

ABSTRACT The Fraunhofer IPT is conducting a great variety of research activities in the field of optics manufacturing whereby both ways, direct and replicative manufacturing, are addressed. Important technologies are ductile and ELID grinding; conventional and ultrasonic assisted diamond turning; polishing, coating and precision glass molding of complex optical components. The research group focuses on developing transparent, deterministic material removal mechanisms and cutting models. The group then transposes these theoretical models into industrial practice. CAx technologies are used to maintain the necessary flexibility and accuracy of the machine control to manufacture a great variety of geometries from planar to free form. The aim is to provide components which feature surface qualities in the nanometer range and form accuracies in the submicron range. The modern equipment combined with the latest measurement technology to research and optimize the above mentioned technologies matches the increasing demands of the industry. The facilities provide the opportunity to efficiently research the according technologies but also manufacture complex glass surfaces such as large aspheric optics with high dimensional accuracy or large glass substrate surfaces with small structures in the micro-meter range. Additionally, the institute covers the whole process chain for precision glass molding, from mold and die making to coating technologies up to glass molding itself. In this context, the institute and the spin-off Aixtooling provide molds and, among other services, feasibility studies mainly for the European market.

BRIEF BIOGRAPHY Professor Fritz Klocke was a research fellow at the TU Berlin at the Institute for Machine Tools and Manufacturing Technology until 1981, and then as head engineer until 1984, receiving his engineering doctorate in 1982. Professor Klocke worked at Ernst Winter & Sohn in Hamburg from 1984 until 1994. In 1995 he was called to the RWTH Aachen as Professor of Manufacturing Engineering Technology at the WZL Laboratory for Machine Tools & Production Engineering and the Fraunhofer Institute for Production Technology IPT.

The Evolution of Wavelength Shrinkage in Lithography

Dr.Masaomi Kameyama Nikon Corporation (Japan)

ABSTRACT Optical lithography has driven the development of miniaturization in the microelectronics industry, thus fulfilling the so-called Moore’s Law. To achieve this lithographers have steadily reduced the wavelength of the illumination light used in the optical systems. However, this reduction has brought many challenges, as we have reduced the wavelength we are typically moving from the visible spectrum through ultra-violet and now towards the soft x-ray regime. The majority of these challenges are related to material properties. Reduction of wavelength narrows the available materials that are sufficiently transparent the further are radiation resistant. We also have a finite amount of wavelengths that can be produced with sufficient power to provide a production worthy light source. In this paper we will examine the history of wavelength transition in optical lithography explaining which material developments have allowed some wavelengths, such as 248nm, to be highly successful, while others such as 157nm and 126nm have failed.

BRIEF BIOGRAPHY He received MS degree in Industrial Chemistry at Seikei University at 1975. He joined Nikon R & D Center in 1975, and then moved to Exposure Tool Designing Department in 1984. Since 1984, he has been in the center of Exposure Tool developments. He is the active member of ITRS Lithography ITWG and the ex-representative of Japan Lithography TWG in 2002 - 2005.