Honorary Chair:

WANG Daheng, Academician, Chinese Academy of Sciences and Chinese Academy of Engineering (China)

Symposium General Chair:

ZHOU Bingkun, President of Chinese Optical Society (COS), Academician, Chinese Academy of Sciences

Symposium General Co-chairs:

James C. Wyant, Director of Optical Sciences Center, Univ. of Arizona (USA)

CAO Jianlin, Vice Director, Ministry of Science and Technology of China

ZHANG Yudong, Director of the Institute of Optics and Electronics (IOE), Chinese Academy of Sciences

Organizing Committee:

ZHANG Yudong Director of Institute of Optics and Electronics, CAS (China), Chair

CAO Jinghua, Deputy Director General of Bureau of International Cooperation, Chinese Academy of Science, Co-Chair

NI Guoqiang, Secretary General of Chinese Optical Society (COS), Co-Chair

Jos Benschop, System Engineering and Research, ASML (Netherland)

John M. Schoen, Center for Optical Manufacturing, University of Rochester (USA)

Edgar Bader, Lithographic Optics Division, Carl Zeiss SMT AG(Germany)

YANG Li, Committee of Optical Manufacturing Technology (COMT), COS (China) Jinxue Wang, SPIE (USA) Eric RUCH, REOSC Optics, SAGEM (France)

Jim Burge, University of Arizona( USA)

David D. Walker, University College Landon (U.K)

Yoshiharu Namba, Chubu University (Japan)

Hexin Wang, Optical Technology Carl Zeiss AG (Germany)

Masaomi Kameyama, Nikon Corporation (Japan)

WU Fan, Institute of Optics and Electronics, CAS (China)

Rongbin Li, Hong Kong Polytechnic University (HongKong)

Tadashi Hatano,Tohoku University (Japan)

LI Jingzhen,Shenzhen University (China)

Mike DeMarco, QED Technologies (USA)

James R.Torley,University of Colorado(USA)

LI Xiaoping, Shanghai Micro Electronic EquipmentCo Ltd China)

Robert Smythe, ZYGO Corporation (USA)

Richard Freeman, ZEEKO Ltd (UK)

Gaven F.Chapmam, Moore Precision Tool (USA)

Program Committee:

YANG Hu, Vice director of Institute of Optics and Electronics, CAS (China), Chair

QIN Yuwen, Natural Science Foundation of China, Co-Chair

Sen Han, Veeco,Co. (USA) Co-Chair

Myung K.CHo, NOAO,(USA) Co-Chair

Bernard Delabre, ESO (Germany)

YU Huadong, Changchun University of Science and Technology (China)

Magomed A.Abdulkadyrov, Lytkarino Optical Glass Factory(Russia)

Jose M. Sasian, University Arizona(USA)

Ming liu, Institute of Microelectronics,CAS (China)

XIN Qiming, Beijing Institute of Technology (China)

LI Wei, Chengdu Fine Precision Optical Engineering Research Centre (China)

Paul Kloceck, ELCAN Optical Technologies (USA)

YU Jingchi, Suzhou Univ. (China)

CHENG Xuemin,Tsinghua University (China)

ZHANG Xuejun, Changchun Institute of Fine Mechanics and Physics, CAS (China)

Mary G. Turner, InfoTek Information Systems (USA)

Han Changyuan, Optical Testing Technology Committee, COS (China)

Masahide Katsuki, Toshiba Machine Co.Ltd(Japan)

Liang Ying Chun, Harbin Institute of Technology(China)

Matthias Pfaff, OptoTech Optikmaschinen GmbH (Germany)

Michael Sander, Satisloh GmbH (Germany)

Thomas Danger, Schneider GmbH (Germany)

Mike Conroy, Taylor Hobson Limited (England)

Secretary General of the Symposium:

YANG Li, Committee of Optical Manufacturing Technology, COS

Jinxue Wang, SPIE Technical Advisor (USA)