Plenary Talks

Title: 50 Years of NASA Mirror Technology Development

Dr. H. Philip Stahl (USA) NASA Marshall Space Flight Center SPIE USA Email: H.Philip.Stahl@nasa.gov

Abstract: For over 50 years, NASA has relied on advanced mirror technology development to enable space telescope missions: from Hubble to JWST. Currently NASA is engaged in technology development to enable even larger and more sophisticated future telescopes. This presentation reviews the needs for space telescopes which drives technology development; traces the history of mirror technology development from the 1957 to the present; and discusses potential future trends in mirror technology development. Specific technology areas include: evolution of mirror architectures, substrate material development, and improvements in optical fabrication and testing technology.

Principal Author’s Biography: Dr. H. Philip Stahl is a Senior Optical Physicist at NASA MSFC and the Astrophysics Division Deputy Assistant Director for Technology and Chair Pro Tem of the Astrophysics Technology Team. Since joining NASA in 1999, he has been responsible for multiple technology development activities. He was responsible for developing candidate mirror technologies for the James Webb Space Telescope (JWST) and is the JWST Optical Telescope Element Mirror Optics Lead. Dr. Stahl co-authored two NASA technology studies: Office of Chief Technologist Science Instruments, Observatories and Sensor Systems Technology Assessment (2011); and Advance Planning and Integration Office Advanced Telescope and Observatory Capability Roadmap (2005). Additionally, he is the originator of the annual “Mirror Technology Days in the Government” workshops. Dr. Stahl is a leading authority in optical metrology, optical engineering, and phase-measuring interferometry. Many of the world's largest telescopes have been fabricated with the aid of high-speed and infrared phase-measuring Interferometers developed by him, including the Keck, VLT and Gemini telescopes. At Raytheon Danbury he was lead optical engineer for the 4 meter LAMP mirror and the Spitzer secondary mirror. Dr. Stahl is a member of OSA, Fellow of SPIE, a past SPIE Director, past ICO Vice President and current SPIE Vice-President Elect. He earned his PhD in Optical Science at the University of Arizona Optical Sciences Center in 1985.

Title: Recent developments in high technology optical manufacturing for astronomy and space applications

Dr. Eric Ruch (France) SAGEM Défense Sécurité REOSC Department Avenue de la Tour Maury 91220 Saint Pierre du Perray France Tel: 33 1 69 89 72 12 Fax: 33 1 69 89 72 40 Email: eric.ruch@sagem.com

Abstract: The manufacturing technologies for astronomy and space instruments are continuously progressing and have tremendously improved over the last decade enabling the design and the production of more challenging optical systems. Telescope for ground based observatories are using larger, faster, more accurate mirrors and deformable mirrors for adaptive correction of the atmospheric turbulence are nowadays a must in all future projects. For space based telescope, new materials such as silicon carbide are used to achieve lighter and more sable mirrors, and off-axis, aspheric shaped surfaces are used in more powerful and more compact configurations. Segmented pupils will be used in the next generation of ground based Extremely Large Telescope but also in large space based observatories and the optical industry will have to face the challenge of producing thousands of meter class off-axis aspheric segments with accuracy never achieved so far. The progress of material, optical processing technologies and optical metrology will be reported through some examples of ground based and space based telescopes projects.

Principal Author’s Biography: Eric Ruch is a graduate in optical engineering from the Institute of Optics in Paris. He has joined REOSC in 1985, has work in lens design for various space and astronomy projects, precision metrology, and development of new optical manufacturing technology; He has also been project manager for many space and astronomy projects. Since 2006, he has been responsible for the business development for the space and the astronomy activities of the REOSC department in SAGEM and more recently he is in charge of the all the space and the astronomy projects in REOSC – SAGEM. He gives courses and lectures of optical systems technology at the Institute of Optics Graduate School in Paris.

Title: Optics Manufacturing Technologies - Challenges and Future Trends

Prof. Fritz Klocke (German) Dr. Olaf Dambon (German) Fraunhofer Institute for Production Technology IPT Head of Department, Fine Machining and Optic Steinbachstraße 17, 52074 Aachen Germany Phone: +49 241 8904 -233 Mobile: +49 (0) 1 62/219 49 48 Fax: +49 241 8904 -6233 E-Mail: olaf.dambon@ipt.fraunhofer.de Internet: http://www.ipt.fraunhofer.de

Abstract: Optics and optical application face an increasing demand. The number of applications is steadily rising leading to increasing requirements of the optical components used. In order to meet these future requirements, the manufacturing technologies themselves have to be continuously further developed. Despite many efforts in alternative manufacturing technologies, however, in optics fabrication the technologies grinding, polishing and molding are still the main technologies for optics manufacturing. This talk gives an overview about current research and development trends in glass optics fabrication. In particular, the grinding and polishing of technical ceramics (Silicon Nitride, Silicon Carbide) is presented as well as new insights in the molding of glass optics. However, the presentation gives also concrete application examples in which this technology know-how was applied, e.g. grinding and polishing of silicon carbide mirrors, grinding of glass ceramics for space optic applications or the molding of micro-optical glass components out of a 4''-wafer. Furthermore, process simulation approaches as well as results compared with real experiments will be presented in order to underline the upcoming necessity of simulation techniques for the design of manufacturing processes.

Principal Author’s Biography: 

1950, Born on October 10 in Vlotho, Germany.

1970 – 1973, Studied manufacturing technology at Lippe Polytechnic in Lemgo.

1973 – 1976, Studied manufacturing technology at the Technical University in Berlin.

1977 – 1981, Scientific researcher at the Institute for Machine Tools and Production Engi-neering at the Technical

University in Berlin 。

1981, Chief engineer in the Department of Production Engineering at the Institute for Machine Tools and Production

Engineering.

1982, Received doctorate of engineering from the Faculty for Design and Manufacturing at the Technical University in

Berlin. From April 1984, Worked for Ernst Winter & Sohn GmbH & Co., Norderstedt. Assistant to the technical director.

From October 1984, Head of Process Monitoring at Ernst Winter & Sohn.

From September 1985, Head of Mechanics at Ernst Winter & Sohn.

1985, Received Otto-Kienzle commemorative medal from the Production Engineering Universities Group.

Since 1995, Head of the Chair of Manufacturing Technology at the Laboratory of Machine Tools and Production

Engineering (WZL) RWTH Aachen. Head of the Fraunhofer Institute for Production Technology in Aachen.

2001 – 2002, Dean of the Faculty for Mechanical Engineering.

2006, Received an honorary doctor title from the University of Hanover.

2007 – 2008, President of the International Academy for Production Engineering (CIRP).

2009, Received a honorary degree of doctor from the Aristoteles University of Thessaloniki (Greece).

2010, Received a honorary degree of doctor from the Keio University Tokyo, Japan.

Title: Fabrication of Nano-optics

Prof. FANG Fengzhou (China) State Key Laboratory of Precision Measuring Technology & Instruments Centre of MicroNano Manufacturing Technology, Tianjin University China fzfang@tju.edu.cn

Abstract: Nano-optics is the study of the behavior of light on the nanometer scale. A wide variety of novel optical properties would appear in nano-optics, such as, strongly enhanced light transmission, beyond diffraction limit, etc. With the rapid development of nano-optics, surface plasmon based nano optical elements development have attracted extensive attention, which can be used in the surface plasmon interference nanolithography, plasmon-enhanced sensing and spectroscopy, and superfocusing on the nanoscale, etc. This report will present the latest development in the fabrication of nano-optics, which has been recognized as one of the most important area in developing nano-optics.

Principal Author’s Biography: Dr F. Z. Fang is currently working as a professor at Tianjin University. He has been involved as a project leader or principal investigator in more than 80 projects in the fields of ultra-precision machining, freeform machining, micro/nano machining and metrology funded by government or industrial partners. He is also the chief scientist for the national key program of 973 on fundamentals of manufacturing freeform optics. He is a fellow of the International Academy for Production Engineering (CIRP), the president of the International Society for Nanomanufacturing (ISNM), and the editor-in-chief of the International Journal of Nanomanufacturing (IJNM).

Title: MEMS and energy harvesting

Prof. Hiroki Kuwano (Japan)  Dr.Eng. Professor, Director of Micro/Nano Center Dept. Nanomechanics, Graduate School of Engineering Tohoku University Sendai Director(2010-2012) of Japan Society of Mechanical Engineering 980-8579 JAPAN tel. 022-795-6255, fax. 022-795-4679 hiroki.kuwano@nanosys.mech.tohoku.ac.jp http://www.nanosys.mech.tohoku.ac.jp/

Abstract: Energy harvesting (or scavenging) plays an important role from the viewpoints of creating new services, solving business and environmental problems in the fields of mobile phones, personal computers, and remotely controlled or autonomous monitoring systems in ubiquitous networks. These systems need cost-effective, long-lifetime electric energy supplies, although to date these have usually been electrochemical batteries as a one of power devices which have to be replaced or recharged. The author will describe the research and development of MEMS(Micro Electro Mechanical Systems) and energy harvesting MEMS that is expected to replace electrochemical batteries in the field of low-power industrial and consumer electronic devices. Recent developments in mobile phones, personal computers, robotics, and artificial organs have highlighted the necessity for high-density and long-lifetime micro electric power supplies. Also, a wireless micro electric power supply is essential for ubiquitous network services such as active RF-ID and sensor-network systems, since for these systems a battery replacement is impractical or impossible. A micro energy harvester applied by MEMS technology, so called energy harvesting MEMS, is one of powerful candidate to meet the requirement of a long-lifetime micro energy. It is expected to play an important role to advance the next generation electrical communication services. The device is a promising device to develop not only new services in the field of medical, information, and communication technologies, but also to address environmental issues such as the reduction of harmful-waste. Moreover, and ultra-distributed micro energy systems are considered to reduce electric transmission loss.

Principal Author’s Biography: Hiroki Kuwano received the B.Eng. and M.Eng. degrees in mechanical engineering and the Ph.D. degree in electrical engineering from Tohoku University, Sendai, Japan, in 1975, 1977, and 1990, respectively. He was a Member of the Electrical Communication Laboratories, Nippon Telephone and Telegraph Public Corporation (NTT). Since 2003, he has been a Professor at Tohoku University. He has 35 years of experience in research and has authored or coauthored over 80 technical papers and books in the fields of MEMS and particle beam processing. His research interests are nanoenergy systems including energy-harvesting systems, as well as sensor networks, particularly for safety and medical applications. Prof. Kuwano was the recipient of the NTT President Award in 1993 and 1994 and the Best Paper Award of The Japanese Society for Precision Engineering in 1997.

Title: Optical Metrology for Freeform Aspheres

Prof. James H. Burge (USA) Large Optics Fabrication and Testing Lab. University of Arizona USA JBurge@optics.Arizona.EDU

Abstract: Modern computer-controlled machines and precision molding capabilities allow manufacture of precise surfaces that have general aspheric shape. The University of Arizona has developed and implemented advanced methods of measuring such general shapes, spanning a wide range of size and accuracy. Fizeau interferometry is combined with computer general holography to measure surfaces to precision of nanometers. A Swingarm Optical CMM measures surfaces as large as 1.8 meters with accuracy of 10 nm. A reflective slope test we call SCOTS Software Configurable Optical Test System, measures general shapes to accuracy much less than 1 µm. It is often said that “If you can measure it, then you can manufacture it.” This talk shows how nearly any precision surface can be measured.

Principal Author’s Biography: Jim Burge is Professor of Optical Sciences and Astronomy at the University of Arizona where he directs the Large Optics Fabrication and Testing and Optomechanics groups. Dr. Burge has published over 250 papers that span the fields of optical design, fabrication, testing, alignment, instrumentation, and optomechanics. Dr. Burge is Fellow of SPIE and OSA, and recipient of the OSA Fraunhofer Burley award.

Title: Ultra-precision manufacture of free-from optical componenets for imaging and illumination applications  

Prof. W. B. Lee (HongKong, China) State Key Laboratory of Ultra-precision Machining Technology The Hong Kong Polytechnic University Hong Kong WB.Lee@inet.polyu.edu.hk 

Abstract: In view of the fast growing development of photonics and telecommunication technologies, the demand for application of novel freeform optics has been increasing. The application of freeform optics breaks through the traditional design of optical imaging. Because of the special requirements for transmission, receiving, transformation, and storage of information in modern photonics and telecommunication technologies, complex freeform surfaces are needed for use in the development of advanced optical systems. The freeform machining process makes use of ultra-precision CNC manufacturing technology. The processes can be used to produce optical freeform surfaces with nanometre level surface finishing and sub-micrometer level form accuracy. The novel optical components formed from freeform optics have become indispensable elements used in information transmission products, computers, photonics and telecommunication products, mobile phones, digital cameras and audio-visual equipment. The successful development of freeform optical surfaces has helped to improve the imaging quality in optical systems as well as enhancing the uniformity of light distribution and efficiency of light transmission in illumination systems. With freeform optics, the flexibility in the design of the layout for prism lenses and optical reflectors can be improved. As a result, the size and the weight of the optical systems can be greatly reduced and the structure and performance can also be optimized. Also, it is possible to adopt mass production techniques which can dramatically reduce the costs. Thus, freeform optics is able to significantly expand the application of optical components so as to support the ability of the industry to keep pace with the rapid growth in market demand. 

Principal Author’s Biography: Prof. W.B.Lee, is the Cheng Yick-chi Chair Professor of Manufacturing Engineering, and the Director of the Advanced Technology Manufacturing Research Centre of The Hong Kong Polytechnic University. He has been the ex-President of the Hong Kong Advancement of the Association of Science and Technology, and Past Chairman of the Institution of Electrical Engineers Hong Kong. Professor Lee established the Ultra-precision Machining Centre (UMC) in 1996 and the Advanced Optics Manufacturing Centre in 2003 which is the first of its kind in Hong Kong and mainland China to be engaged in the promotion and application of ultra-precision machining technology for precision mould and advanced optics industries. In 2009, The Centre was endorsed by the Ministry of Sceince and Technology of PRC China as a Hong Kong State key laboratory in Ultra-precision Machining Technology. Professor Lee has chaired various international conferences in manufacturing (IMCC) and materials processing ( APCMP), and is the founder chairman of the Asia-Pacific Conference in Engineering Plasticity and its Applications (AEPA). He had also been elected as the President of the Asian -Pacific Symposium on Precision Engineering and Nanotechnology (ASPEN) for the period 2009-2011. He currently serves on the Editorial Board of the Proceedings the Institution of Mechanical Engineers UK, Part B : Journal of Engineering Manufacture, Journal of Materials Processing Technology , and the Directorate Board of the Chinese Journal of Mechanical Engineering. In addition, he is the co-chief editor if the Journal of Information and Knowledge Management Systems. His research interests include advanced manufacturing technology, materials processing, ultra-precision machining, manufacturing strategy and knowledge based systems. He has published two books as well as more than 300 papers in international journals.

Title: Optical Technology Enabling Nanolithographic Chip Manufacturing  

Dr. Tilmann Heil (German) System Engineering at Carl Zeiss SMT GmbH

Abstract: Optical nanolithography is a key manufacturing technology of the semiconductor industry. For more than four decades, the ever increasing performance of integrated circuits is closely linked to the progress of the optical technologies used in lithography systems. Already back in 1965, Intel founder Gordon Moore had observed that the structures on a chip shrink over time such that the transistor density on a chip doubles approximately every second year. This so-called “Moore`s law“ is still valid today since the timely increase in chip transistor density is the most efficient way to improve the chip performance and reduce the chip’s cost per function. Hence, the maximum achievable resolution of the structures on a chip is a key success factor which is directly linked to the performance of the optical system of the lithography tool used for the chip structuring. Therefore, optical technologies play a key role in enabling today’s and future chip manufacturing. 

In this paper, we address the challenges to optical technologies in nanolithography systems used for the most advanced chip manufacturing. Special emphasis is given to the optical technology developments related to the manufacturing of Extreme Ultra-Violet (EUV) lithography systems. In particular, we review requirements and actual performance data of EUV optics for high-volume chip manufacturing. Based on this data and future design studies, we underline the potential of the EUV lithography optics for further increasing the resolution which will enable chip mass production in continuation of Moore’s Law throughout the next decade at least.

Principal Author’s Biography: Dr. Tilmann Heil is currently Director System Engineering at Carl Zeiss SMT GmbH. He joined Carl Zeiss in 2002 where he started his career in the field of lithography optics as a scientist for imaging applications. Subsequently, he held several positions in system engineering, technical marketing, and R&D cooperation program management. He received his Diploma and PhD in Physics from Darmstadt University of Technology in 1997, and 2001, respectively.  

Title: Research on the manufacturing technology and equipment for optic elements with nanometer accuracy 

Prof. LI Shengyi (China) National University of Defense Technology  

Abstract: The high precision manufacturing of optical elements represents the frontier of ultra-precision machining currently, and it demands nanometer or even sub-nanometer machining accuracy. For example，high precision optical instrument parts ，lithography projection lens of microelectronics manufacturing, soft and hard X-ray telescope in space, optic elements of Inertial Confinement Fusion (ICF) System, etc. higher requirement for manufacturing technology and equipments. The controllable compliant tool (CCT) technology ， Magnetorheological Finishing (MRF) and Ion Beam Figuring(IBF) technology as typical examples , are new methods of optic surface machining with nanometer accuracy based on energy currents controlled by computer exactly .It is a new challenge to traditional manufacturing technology and equipments affirmatively. In this paper， our research about MRF and IBF technology and equipments is briefly introduced, Such as the material removal mechanism and mathematic model， strategy of redundance control, 4D NC technology, theory of error evolvement and control technology, and equipment design and developing technology. The state-of-the-art of nanometer accuracy lens machining and experiments of our Lab. are also introduced.

Principal Author’s Biography: Professor Li Shengyi, who was borne in April 1946, graduated from south-centre university in 1968 on undergraduate education, and Zhejiang university in 1981 on postgraduate education respectively，He is a professor of the school of Mechatronics Engineering and Automation, National University of Defense Technology. He is the chairperson of The Committee for Precision Engineering and Micro-Nanotechnology of CMES，the chief scientist of the National Important Foundational research project(973). Since 1981，he focused on the teaching and research of precision engineering，His research includes ultra-precision machining, MEMS, optical machining and measuring. He published more than 100 papers and 6 books including “Accuracy modeling technology of precision and ultra-precision machine tool”, ”On-situ measurement and error compensation technology of precision and ultra-precision machine tool”, ”Control technology of precision and ultra-precision machine tool” and “The design theory and method for precision and ultra-precision machine tool” published by press of NUDT(http://www.gfkcbs.com). “New technology for manufacturing and measurement of large and middle-scale aspheric mirror” published by press of NDI(http://www.ndip.cn). In recent years his group focuses on the optical elements manufacturing and equipments research, such as diamond cutting, grading, lapping and polishing processes and equipmenst, CCOS,.Magnetorheological finishing (MRF), Ion Beam Figuring (IBF) and Fluid Jet Polishing (FJP) etc.

Title: Design and development of a Prototype of the GMT Fast Steering Secondary Mirror

Dr. Myung K. Cho National Optical Astronomy Observatory 950 N. Cherry Ave. Tucson, Arizona 85719 U.S.A.

Abstract: The Giant Magellan Telescope (GMT) will be a 25m Gregorian telescope currently in the design and development phase. The GMT is equipped with a fast-steering secondary mirror (FSM) which is a 3.2 m in diameter with a fast focal ratio of 0.65. The FSM consists of seven segments, each of which is 1m in diameter, and its surrounding six segments except the center one are off-axis mirrors. The FSM has a feature to compensate the image degradations caused by wind disturbances and structure jitter by using a tip-tilt mechanism. The Korea Astronomy and Space Science Institute (KASI) is developing a prototype of the FSM together with several collaborators in Korea and the National Optical Astronomy Observatory (NOAO) in USA. The prototype is a full-size FSM segment, which is divided into two features functionally; an off-axis mirror and a test-bed for tip-tilt actuation. The off-axis mirror with a diameter of 1.06m is being fabricated and the tip-tilt system will be demonstrated. A parametric design study to optimize the FSM mirror configuration was performed. In this trade study, the optical image qualities and structure functions for the axial and lateral gravity print-through cases, thermal gradient effects, and dynamic performances will be discussed. In this paper, current progress of the prototype development and future works are to be addressed.  

Principal Author’s Biography: Dr. Myung Cho servers as a principal engineer at the National Optical Astronomy Observatory (NOAO). He has been involved in the design and development of the optical telescopes and optical instruments including the Thirty Meter Telescope Project, the Giant Magellan Telescope, the Advanced Technology Solar Telescope, the Large Synoptic Survey Telescope, the GEMINI 8m Telescopes, the WIYN 3.5m telescope, Gemini Near Infrared Spectrograph, and a variety of other telescopes and optical systems. Prior to joining NOAO, he was on the faculty at the College of Optical Sciences at the University of Arizona. Dr. Cho also serves as an adjunct professor at the Engineering Mechanics and the College of Optical Sciences. He earned his Ph.D. from the University of Arizona in 1989.