SAGEM - REOSC : 60 years of High Tech Optics

Dr. Roland GEYL SAGEM - REOSC France

Abstract The REOSC company, now part of SAGEM Defense Securité, haspionneered high performance optics design and manufacturing during morethan 60 years and built a unique panel of skills dedicated to precision-optics for Astronomy, Space, Laser and other applications. A rapid tour of some chall- enging opto-mechanical projects will be offered to the audience with highlight on the giant 8-m mirrors for the Very Large Telescope and the segmented Gran Telescopio Canarias.

Brief Biography Roland GEYL graduated the Ecole Superieure d'Optique in Orsay, near Paris,in 1979 and joined REOSC in 1981. He learned and practiced the variousfacets of the profession from lens design, optical polishing, opticalmetrology, align- ment and integration, project management and commercial negotiation. Today he is Deputy Director of the REOSC Business Unit of SAGEM Defense Securite, in charge of marketing and business development. In parallel, Roland GEYL teaches lens design at the Institute of Optics.

Current development of advanced optical manufacturing and testing technologies in IOE, CAS

Dr. Yuan jiahu IOE,CAS,China

Abstract Current development of advanced optical manufacturing and testing technologies in Institute of Optics and Electronics, Chinese Academy of Sciences is reported in this present- ation. In advanced optical manufacturing technologies, the large astronomical telescopes, the large mirrors and the light-weighted mirrors are being developed in our Institute. The active manufacture technology of the large mirror is being carried on. In advanced optical testing technologies, we have developed a serial of Hartmann-Shack wave-front sensors used in this field. In this presentation, the applications of Hartmann-Shack wave-front sensors for optical testing of optical components and systems are also presented.

Brief Biography Prof. Yuan Jiahu is a vice president of the Institute of Optics and Electronics Chinese Academy of Sciences. He received his BS degree in Optical Instrument from HuaZhong Univer- sity of Science and Technology, his Ms degree in Optical Engineering from Institute of Optics and Electronics, Chinese Academy of Sciences (CAS), and his PhD degree on Mechanical Engineering from Sichuan University in 1985, 1988 and 1999 respectively. Prof. Yuan Jiahu has been a visiting scholar at University of Colorado, USA in 1995-1996. He is a member of Committee of Science &Economy of High-tech research on the development center of Ministry of Science and Technology, PRC. Since 1989, he has been engaged in research on optical engineering, such as Opto-electronic technologies, optical apparatus, and space optics technologies.

Design study of telescope optics for The Thirty Meter Telescope (TMT)

Dr. Myung K. Cho  National Optical Astronomy Observatory (USA)

ABSTRACT The Thirty Meter Telescope Project is a collaboration of the California Institute of Technology, the University of California, the Association of Universities for Research in Astronomy, and the Association of Canadian Universities for Research in Astronomy. The telescope will be used for research in astronomy at visible and infrared wavelengths. The optical design is an Aplanatic-Gregorian with a 30 meter diameter, f/1, segmented primary mirror (M1); a 3.6 meter diameter, concave secondary mirror (M2); and an elliptical (4.1m in major axis and 3 meter in minor axis) flat tertiary mirror (M3). These will deliver an f/15 beam to adaptive optic systems and science instruments located on two Nasmyth platforms. This paper will describe an overview and current status in the design and development of the telescope optical systems (M1, M2, and M3) of TMT. Additionally, current design concepts and the optical performances of the telescope optics will be discussed.

Brief Biography Dr. Myung Cho servers as a principal engineer at the National Optical Astronomy Observatory (NOAO) He is currently working on the optical systems of the Thirty meter Telescope Project. His prior telescope projects are: WIYN 3.5m telescope, the GEMINI 8m Telescopes Project, and many more telescopes.

The Mechatronic Approach to the Design of Large Mirrors and Telescopes

Dr. Hans J. Kaercher MAN Technologie AG(Germany)

ABSTRACT The challenges for the first telescope designers were the polishing of the lenses or mirrors, thepointing of them to the stars, and the tracking of the sidereal movement. The classical technologies, which they used, were spherical mirror polishing, passive, isostatic supports for themirrors, and equatorial mounts with clockwork drives. The maximal sizes which they could achieve with these technologies, were 5 to 8m main aperture diameter. The practical limits in the sizes of the “mechanical” age were overcome with the upcoming of electronic control elements and digital computers. Now, giant optical telescopes in sizes from10 to 100m are under construction or in planning. For these telescopes – beside the optical-layout itself – the integrated system (= “mechatronic”) approach to the structural, mechanicaland control elements, which support the optical components, are a major issue for the finalsuccess of the projects. The talk will highlight some major aspects of this mechatronic approach, as system design, end-to-end simulation, control architecture for segmented mirrors, and on-site erection and commissioning, and will be supported by photos, sketches and diagrams.

Brief Biography Hans Juergen Kaercher, borne 1941 in Offenbach, Germany, studied mathematics, mechanical and structural engineering at the Technical University in Darmstadt. PhD on numerical methodsin engineering (finite element methods) at TU Darmstadt. Since 1974 project manager, system engineer for telescopes at MAN Technologie in Mainz, Germany (now MT AerospaceAG). Major projects: 30m MRT Pico Veleta telescope for MPIfR in Spain; 40x120m EISCATantennas Tromsö, Norway; 15m IRAM telescopes Plateau de Bure, France (carbonfiber); ESO3,5m NTT telescope (design mechanical subsystem); ESO VLT telescopes (design study mirrorcell); 2,7m airborne telescope SOFIA (system design, construction, commissioning); 50mLMT telescope Cerro la Negra, Mexico (system design); 64m SRT telescope Sardinia, Italy(construction); 28m Cherenkov telescopes MPIfK, Heidelberg (design study); and many others!

Interferometric Techniques Applied in Packaged MEMS and MOEMS Measurement

Dr. Sen Han Veeco Instruments, Inc. (USA)

ABSTRACT It is well-known that MEMS (MicroElectro-Mechanical Systems) and MOEMS (Micro-Opto-Electro- Mechanical Systems) are integrated devices. These devices are manufactured using batch fabrication techniques similar to those used for integrated circuits where quality control is a key to making a successful product. Currently, approximately 50 - 80% of the total cost of MEMS comes from final packaging and test; successful products will require rapid, accurate metrology of the devices to improve yields and profitability of the devices. Interferometric techniques in optical profiler have proven successful for measuring surface features of unpackaged MEMS devices due to its high speed, accuracy, and flexibility. With the further productization of MEMS technology, however, the devices need to be tested in their final packaged state, typically underneath a protective surface such as glass, plastic, or sapphire. Lowmagnification objectives capable of imaging through dispersive media have been available for several years. Increasingly, though, MEMS devices require high-magnifications in order to resolve key features. With high magnification, however, transmissive media can greatly degrade the interferometric measurement due to dispersion and aberration effects. In addition, long working distance optics are required to accommodate the distance between the protective layer and MEMS device.  In this paper, improved techniques are described to measure surfaces through- transmissive-media (TTM) at higher magnifications. Many factors must be optimized, including dispersive compensation, coherence effects, thickness variation insensitivity, and illumination. Measurement results will be presented for a standard objective and a dispersion-compensated objective, as well as some MEMS application examples.

Brief Biography Dr. Sen Han, as Senior Staff Scientist, works at Veeco Instrument. Dr. Han is an adjunct professor of College of Optical Sciences, University of Arizona, USA and of Optical Engineering, Changchun University of Science and Technology, China. Dr. Han is also member of SPIE, OSA and ASPE.

Development of advanced Optics Manufacturing Technologies

Dr. W.B. Lee The Hong Kong Polytechnic University

ABSTRACT Advanced Optics is an important catalyst in the development of micro-optoelectro-mechanical devices and systems used in photonics and telecommunication products. Over the past decades, the optics industry has grown from a skill and manual based industry to one that has been based on advanced manufacturing technologies. In the USA alone, there are more than 5000 such small firms with an estimated turnover of more than US$ 50 billion. The mass production of cheap spherical glass lenses and plastic aspheric lenses has moved to low cost manufacturing centres such as the Far East and mainland China. The more high-value-added part of the product spectrum has shifted to the design and fabrication of novel surfaces involving detail microstructural features such as V-groove, pyramid structures and micro-lens array, and freeform surfaces, which are crucial to the development of complex and micro-optical-electromechanical devices used in many photonics and telecommunication products and systems. Typical products include laser printers, hand held scanners, tube TV compensators, phase modulation mirrors, LCD backlights and broad band optical fiber connectors. Ultra-precision machining based on Single-Point Diamond Turning (SPDT) and Ultra-precision Freeform Machining (UFM) has become an indispensable tool for the design and manufacture of high-technology and high-precision optics. These processes can be used to produce optical quality surfaces with nanometer-level surface finishing and sub-micrometer form accuracy without the need for any subsequent polishing. With the fast growing development of the machining technology, ultra-precision machining technology is no used only for the manufacture of symmetrical spherical and aspheric workpiece. It can also be used to produce some very complex and non-symmetrical profiles. In this paper, the trend in the development and application of ultra-precision machining and measurement technology in advanced optics manufacture is presented. The research and development work by Advanced Optics Manufacturing Centre of The Hong Kong Polytechnic University will be introduced.

Brief Biography Professor W B Lee is the Chair Professor and Head of the Department of Industrial and Systems Engineering of The Hong Kong Polytechnic University. He is also the Director of the Advanced Manufacturing Technology Research Centre and Head of the Ultra-precision Machining Centre of the University. His research interests include manufacturing technology, ultra-precision machining, mesoplasticity and manufacturing strategy. He has published two research books as well as more than 300 papers in international journals and conferences. Prof. Lee is the regional editor of the Journal of Materials Processing Technology, editorial member of the Journal of Engineering Manufacture and the Chinese Journal of Mechanical Engineering. He is the immediate past chairman of Hong Kong Association for the Advancement of Science & Technology, and past chairman of the Institution of Electrical Engineers (Hong Kong) Prof Lee and his research team are currently focusing on the development of ultra-precision freeform machining technology. This technology can be applied to the manufacture of freeform surfaces and optical microstructures for telecommunications and photonic products. The research include the development of a software of tool path generation for ultra-precision freeform machining; the development of freeform measuring technology as well as the development of the design and the machining process of ultra-precision microgrooves and microlenses.

Recent advanced in sub-aperture approaches to finishing and metrology

Dr. Mike DeMarco QED Technologies (USA)

Abstract Subaperture polishing technologies have radically changed the landscape of precision optics manufacturing and enabled the production of components with higher accuracies and increasingly difficult figure requirements. Magnetorheological Finishing (MRF®), for example, is a proven, productionworthy, deterministic, sub-aperture finishing technology that has excelled at extending precision finishing well beyond the limitations of traditional polishing. Several recent MRF developments will be presented, including the post polishing of Single Point Diamond Turned (SPDT) surfaces, transmitted wavefront correction, and finishing of increasingly large apertures. The high precision finishing of challenging optics using a newly developed jet-based technology will also be discussed. A series of examples spanning a wide range of materials, geometries and specifications will be presented. Specific areas to be discussed include the finishing of optics less than 5 mm in diameter, which typically require a very labor-intensive, iterative process to finish, and the correction of steeply concave optics, such as domes, which are typically not well suited for sub-aperture polishing processes.

Brief Biography Mike DeMarco, Marketing and Sales Manager for QED Technologies, has spent his entire career in the fields of precision optics manufacturing and optical system assembly and test. QED develops, manufactures and markets finishing and metrology equipment for the precision optics industry. Prior to joining QED, he managed the Optical Assembly and Test Department at SVG Lithography Systems in Wilton, CT. His academic background includes an MBA degree in Marketing and Operations from the University of Connecticut, and a BS degree in Optical Engineering from the University of Rochester. He is the author of many articles and papers in his chosen fields of interest.

Lithography for Microand Nanooptics

Dr. E.-Bernhard Kley Friedrich-SchillerUniversity Jena (Germany)

Abstract Miniaturization and microstructures are keywords in the modern technical world. Optical components and systems are affected by this trend, too. This means, miniaturized optical lenses, prisms, gratings and even artificial materials based on sub-wavelength structures have to be fabricated for a lot of applications. As a consequence micro- and nanolithography is challenged to realize complex micro-optical elements as well as artificial materials, both on the base of 2D and 3D microstructures. In order to fabricate such optical elements and materials, special demands on lithography or micro- and nano-machining arise from the wave nature of light. This refers to the accuracy, as well as to special 2D and 3D fabrication techniques. The talk is discussing the basics as well as the vision of Micro- and nanooptics and gives an overview of the technologies (with a focus on lithography). Selected applications illustrates the potential of the field.

Brief Biography Ernst-Bernhard Kley received his diploma and Ph.D. in physics from the Friedrich-Schiller-University Jena in 1974 and 1987 respectively. After he received his diploma in physics and before he started his doctoral work, he earned three years industrial experience. Dr. Kley general fields of research are micro- and nanolithography, various e-beam writers, scanning electron microscopes, applied to micro-optics, integrated optics, and cryogenic electronics. Currently he is the head of the Microlithography and Micro-optics Group at the Institute of Applied Physics of Friedrich-Schiller- University Jena. He is author and co-author of more than 90 scientific papers, 3 book chapters and organized or was involved in organization of several conferences. Since the beginning of the 1990s, he was a partner of more than 40 European and national projects and established the cooperation with many international partners.

Trends in UV optics

Dr. Hans Lauth JENOPTIK Laser, Optik, Systeme GmbH (Germany)

Abstract Optical technologies have essential importance as driving forces of innovations in the markets of the 21st century. They are key technologies which create the conditions for a lot of new developments and their applications in the future. It is a general trend to use shorter and shorter wavelengths. This trend is strongly driven by the lithography market, but also noticeable for excimer laser applications in material processing, life sciences, health care, analytical technique and sensors. The demands lead to the physical limits. On the one hand this needs basic research in the fields of laser radiation - material interaction, material science, physical, chemical and micro - structural properties of thin films and surfaces. On the other hand new manufacturing technologies and methods (Computer controlled polishing, Magneto rheological finishing, Ion Milling) and new measurement equipment are required. A general progress in the deterministic production and in the metrology methods and equipment is reached in Europe in the last years.

Brief Biography Hans Lauth received his Diplom Physiker in 1974, his Dr. rer. nat. in 1991 from the University of Jena, Germany. From 1974 he works in different R&D positions in the JENOPTIK AG (former Kombinat Carl Zeiss Jena) on the field of optical thin films and optical production technologies. Since 1998 he heads the Business Unit Optics in the JENOPTIK Laser, Optik, Systeme GmbH. He has authored a number of papers and patents in the field of thin optical films and optical production technologies.

Recent advancesin phase shifting interferograms analysis

Dr. Malacara-Dobl ado Daniel Centro de Investigaciones en Optica , A. C. (Mexico)

Abstract Nowadays grate efforts are being made to improved the mathematical analysis of phase shifting interferograms. The aim is to develop algorithms that are inmune to errors due to noise, miscalibrations, vibrations and many others sources. In this presentation I will make a short review of this topic, ending with the most recent advances.

Brief Biography He was born on June 6, 1967 in México, D. F. He studied the BS in Electronics Engineering at the Universidad Iberoamericana in León, Gto. He obtained his MCs and PhD in Optics at the Centro de Investigaciones en Optica, A. C. On July 1996 he attended the Optical Science Center of University of Arizona in Tucson, AZ. He was an associate researcher from November 1996 and now he is a titular researcher at the CIO. In January 2005 he was appointed head of the Optical Engineering department. His fields of research are optical design, optical testing and interferometry. Recently, his main interests have been to develop new techniques for the cuantitative evaluation of Hartmann test data and also the develoment of new algorithms for phase shifting interferometry.

Fabrication Technologies for Large Ultra Precision Flat Optics

Dr. Yaolong Chen Berliner Glas KGaA Herbert Kubartz GmbH &Co. (Germany)

Abstract Large ultra precision flat optics has been fabricated until now by iterative trials. The success depends strongly on experiences of the opticians. The manufacturing costs in this way are relatively high. Such methods are mostly suitable for small quantities. If a big quantity of large ultra precision flat optics should be made there is a need for fabrication technologies which enable the required high form accuracy and surface quality with reasonable manufacturing costs. A new approach which is called “digital fabrication” was developed to cover this need. The strategy of this approach is to optimize the whole process chain instead of only the finishing process. The target is to make the single steps of the process chain as stable as possible. The whole fabrication procedure will be tuned and controlled digitally. For example, the conventional rough grinding and lapping processes on different machines will be replaced by rough, fine and finest grinding at one clamping on one CNC grinding machine. The polishing will be carried out with polyurethane pad and pitch on CNC polishing machines. Finally the required form accuracy and surface quality will be achieved by ion beam figuring, MRF or computer controlled polishing (CCP). In this way the manufacturing time could be shortened remarkably. The fabrication procedure can be scheduled deterministically and the production costs can be reduced dramatically. Keywords: Flat optics, grinding, Lapping, Polishing, process chain, surface finish.

Brief Biography Studied Special Manufacturing Systems for Electronic Industry at the Xi’an Jiaotong University in Xi’an/China and got the Bachelor of Mechanical Engineering Science. He started then his master study of precision mechanical engineering at the same university. He continued his work at the Institute for Production Technology and Machine Tools of University of Hanover in Germany. His research work was emphasized on grinding process and machine dynamics. Under the guidance of the professor Hans Kurt Toenshoff he investigated and modeled the surface topography and machine parameters of the grinding process. His PhD thesis was titled “Study on Vibrations and Wavenesses During In-feed Plug Grinding”. From 1990 to 2001 he worked with Carl Zeiss in the Technology Center in Oberkochen in Germany. He managed different projects in the area of manufacturing technology of optics, especially the technologies and manufacturing systems for aspherical surfaces. His main interests were diamond turning, micro grinding, fly cutting and polishing of aspherical and free form optics. While working with Carl Zeiss he developed many special machines for production of such products. Then he jointed LOH optical machines until 2002. Since then he has been worked as chief engineer with Berliner Glas KGaA in Berlin Germany. His actual research work is concentrated on high efficiency deterministic processes and machines for manufacturing precision optics.